SSE / ATMsse

We service various SSE Sister Semiconductor Equipment GmbH / ATM sse machines worldwide:

  • Maximus 804 Coater- Developer and Lift-Off Tracks (pictures will follow soon)
  • Optiwet
  • Opticoat
  • Optihot

We repair and refurbish all stations like coat, develop, hotplate and coolplate stations.

Our large stock of spare parts consists of PMA Controller Modules, Metronix Spin Controllers, Spin Motors and a large variety of obsolete parts.

SSE ATMsss Maximus 804 and 806 Coater Developer Track system.

Maximus 804 Coater Developer System with either Genmark Robot or Isel Robot. This system is similar to the Gamma 60/80 from Suss Microtec. The Maximus can handle wafers from 3″ to 8″. With its Closed Cover Chuck a better uniformity on square substrates can be achieved.

Coater Developer Track system from SSE ATMsse.

Open Bowl Coater with Stepper Motor Driven Dispense Arm. The lifting pins transfer the wafer after process end back to the robots endeffector.

OPTI COAT from SSE ATMsse large substrate coater.

SSE Opticoat 75 . The machines are for large square substrate coating for up to 16 “ or larger. The machine has a servo motor driven Air Barrier Plate that closes in on the chuck to allow for better coating results similar to the Gyrset effect from Suss Microtec. The dispense arm is programable, but in most FABs not used.

SSE ATMsse Developer, Etcher, Cleaner System

Optiwet Developer, Etcher, Cleaner System for large Substrates. Manual Load. Stepper Motor Driven Dispense arms.

 

 

 

 

 

 

 

 

 

 

 

Optiwet Process Chamber with 2 Dispense arms and various nozzles for Di Water, Cleaning or Etching Media, N2 or CDR Dry spin. Backside Rinse is also available. The Waste Management of the Optiwet is also integrated to separate Di Water and Process Media.