New Arrivals – Special Offers

Here we present our new arrivals and special offers. We are constantly updating this page and look forward to any inquiries about the spare parts and machines shown here. We are also happy to answer general inquiries about our services or specific parts inquiries. We have a large warehouse and can currently only show a small part on our site.

1. Machines
Coming soon:

  • Suss Falcon Developer System (MMC SW) with 2 Developer Modules and Hotplates and Coolplates, Still installed in the FAB.
  • SSE Maximus Automated Coater Developer System with 1 Coater & 1 Developer Module, 2 Hotplates, 1 HMDS Hotplate and 1 Coolplate , 1 Genmark Robot. Pictures will follow soon. Still installed in Cleanroom.

Both tools are immediately available.

In Stock:

2X GAMMA Spraycoater with Double Nozzle from SUSS MICROTEC


1X SUSS MICROTEC GAMMA CLUSTER

High Throughput 4″ to 8″  Suss Microtec Spray Coater Dual Nozzle Track

  • Vintage 2014, Deinstalled January 2020, Excellent Condition

  • 3 Tracks immediately available, 1 Track hooked up for Onsite Demo. 

  • 2 More Tracks to become availabe in March 2021
  • Installation and Training available
  • Lots of Spare parts available
  • Konfiguration: 2 Spray Coat Modules, 1 Developer Module, 1 Hotplate Stack with 2 Coolplates, 1 Hotplate 250 degree, 2 HMDS Hotplates

Left Side View of the Gamma_ Spray Coat Module and Developer Module
Left Side View of the Gamma_ Spray Coat Module and Developer Module
Pre Alligner with CCD Camera
Pre Alligner with CCD Camera
Right side view Hotplate Stack and Spray Coat Module
Right side view Hotplate Stack and Spray Coat Module
Spray Coat Module 1 with 2 Nozzle Heads
Spray Coat Module 1 with 2 Nozzle Heads
Spray Coater Front side View with Touchscreen HMI and Keyboard
Spray Coater Front side View with Touchscreen HMI and Keyboard
Spray Coater Sankyo Robot
Spray Coater Sankyo Robot
Layout Suss Gamma Dual Nozzle High Throughput Spray Coater
Layout Suss Gamma Dual Nozzle High Throughput Spray Coater

 


CONVAC M6000 AUTOMATED COATER DEVELOPER TRACK EDGE HANDLING : 1COATER 1 DEVELOPER, 2 CARRIER PORTS SENDER, 3 ROBOT, 2 HP, 1 CP, 2 RECEIVER PORTS

Coater Developer Spin Coater Spin Developer

Reliable process tool. 6″ Track. All spare parts and service support available.


SSE DOMINUS – STANDALONE SPRAY COATER WITH 1 MANUAL HOTPLATE


Suss Gamma Developer Cluster System (2015 vintage) 4 Developer Module, 4 Hotplates, 3 Coolplate

Immediately available, Location Germany, The tool can still be inspected in the FAB.


Suss Gamma Fully automated Spray Coater / Developer Cluster System (2013 vintage, serviced by Suss, in excellent condition).

Immediately available, Location Germany.The tool can still be inspected in the FAB until the end of February 2020.


Also in Stock (Pictures on request):

  • SSE Maximus Automated Spin Coater with 5 Hotplates
  • Karl Suss RC8 Spin Coater
  • Suss 300 mm Close Cover Chuck Coater, Standalone Tool
  • Convac Automated M6000 Double Bowl Coater , 1 Robot, 2 HP, 1 CP,
  • Convac M6000 Automated Single Open Bowl , 1 Robot, 2 HP, 1 CP, Workhorse Machine

All Machines are fully refurbished: Spare Parts and Service on all tools available.

2. Spare Parts:

SUSS GAMMA 60/80 PC7 SBS CAN BUS PC

PC7 SBS, OBSOLETE PART FOR SUSS MICROTEC GAMMA 60 AND 80 , CAN BUS UNIT, Network
PC7 SBS CAN BUS NETWORK PC FOR SUSS GAMMA – ACS COATER DEVELOPER TRACKs

Karl Suss ACS 200 Classic- Hotplates – Coolplates and other Spare Parts

Karl Suss ACS Classic Coater Developer Track Hotplate and Coolplate
New Coolplate, 3 brand new cassettes are available, Hotplates and Vapor Prime plates are also available


Pumps

APEX Photoresist Pump Expert Repair and Refurbishing House. Cybor Pumps, Cybor Control Module
Cyobor Pumps We offer Repair serivce, Refurbishing, Maintenance and Training on Cybor Pumps and Controllers. Contact us for Details and for and RMA Number.
Wafertec resist pump. These pumps are Stepper Motor driven pumps. There is no membrane inside the pump. The pneumatics of the pump are extremely reliable and the repeatability of the dispense volume is remarkable.
These pumps are widely used and are the main resist pumps for Suss Microtec Coaters and also Developers. We offer repair and refurbishing service and have new and preowned pumps available for immediate sale.

If you have further questions or need more pictures please contact us !

All prices are on request.