PVA TePLA GIGA 690

We are selling here a GIGA 690 from PVA TePLA.

The GIGA 690 is a MICROWAVE PLASMA SYSTEM. Further information:

PROCESS CHAMBER

  • Material Aluminum
  • Volume 91 liters
  • Inner dimensions 450 x 450 x 450 mm
  • No RF- electrodes inside chamber

VACUUM SYSTEM

  • Vacuum connection DN 63 ISO K
  • Process gas control 2 gas channels standard,
  • each with MFC and solenoid valve
  • Base pressure Approx. 2 x 10-2 mbar
  • Process pressure Approx. 0.2–2 mbar
  • Evacuation time Approx. 1 minute
  • Vacuum gauge Capacitance manometer,
  • 10-2 to 10 mbar
  • Venting Solenoid valve

PERFORMANCE DATA

  • Uptime >95%
  • MTBF >500 h
  • MTTR <2 h

SYSTEM CONTROL

  • Hardware PC based system controller
  • 10,4″ monitor, GUI
  • Light Tower system status r/g/y
  • Software Realtime Operating System QNX
  • Manual and automatic system control
  • multiple recipe storage
  • Process recipe up to 100 recipes
  • with 1-10 steps each
  • System selftest routine,
  • warnings error message dialog
  • Soft- and hardware safety interlocks,
  • optical plasma intensity monitoring

SUPPLIES

  • Electricity 230 V, single-phase, 15 A, 50/60 Hz
  • Process gas 1/4“ Swagelok connector,
  • input pressure 1–2 bar
  • Compressed air 1/4“ Swagelok connector,
  • input pressure 4–6 bar

PLASMA SOURCE

  • Microwave Generator
  • Frequency 2.45 GHz
  • Adjustable magnetron, air-cooled,
  • proprietary antenna and coupling geometry
  • Power 0–1.000 W

DIMENSIONS

  • W/H/D Approx. 1.050 x 1.750 x 800 mm
  • Weight 195 kg (system only, excluding pump)

OPTIONS

  • Pumping system Vacuum pump system comprising
  • rotary vane pump or combination of
  • rotary vane pump and 250 m3/h
  • (145 cfm) rootsblower,
  • 400 V, 3 phase, 32 A max.
  • Rotary platform Aluminum, 400 mm Ø
  • Gas channels 3–4
  • ECR setup
  • Photoresist Ashing
  • SU8 Ashing

The GIGA 690 was 4 years in production and is in a realy good condition.

The Machine is fully functional and can be inspected. The location is in Germany. For further information please contact us.

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