PVA TePLA GIGA 690

We are selling here a GIGA 690 from PVA TePLA.

The GIGA 690 is a MICROWAVE PLASMA SYSTEM. Further information:

PROCESS CHAMBER

  • Material Aluminum
  • Volume 91 liters
  • Inner dimensions 450 x 450 x 450 mm
  • No RF- electrodes inside chamber

VACUUM SYSTEM

  • Vacuum connection DN 63 ISO K
  • Process gas control 2 gas channels standard,
  • each with MFC and solenoid valve
  • Base pressure Approx. 2 x 10-2 mbar
  • Process pressure Approx. 0.2–2 mbar
  • Evacuation time Approx. 1 minute
  • Vacuum gauge Capacitance manometer,
  • 10-2 to 10 mbar
  • Venting Solenoid valve

PERFORMANCE DATA

  • Uptime >95%
  • MTBF >500 h
  • MTTR <2 h

SYSTEM CONTROL

  • Hardware PC based system controller
  • 10,4″ monitor, GUI
  • Light Tower system status r/g/y
  • Software Realtime Operating System QNX
  • Manual and automatic system control
  • multiple recipe storage
  • Process recipe up to 100 recipes
  • with 1-10 steps each
  • System selftest routine,
  • warnings error message dialog
  • Soft- and hardware safety interlocks,
  • optical plasma intensity monitoring

SUPPLIES

  • Electricity 230 V, single-phase, 15 A, 50/60 Hz
  • Process gas 1/4“ Swagelok connector,
  • input pressure 1–2 bar
  • Compressed air 1/4“ Swagelok connector,
  • input pressure 4–6 bar

PLASMA SOURCE

  • Microwave Generator
  • Frequency 2.45 GHz
  • Adjustable magnetron, air-cooled,
  • proprietary antenna and coupling geometry
  • Power 0–1.000 W

DIMENSIONS

  • W/H/D Approx. 1.050 x 1.750 x 800 mm
  • Weight 195 kg (system only, excluding pump)

OPTIONS

  • Pumping system Vacuum pump system comprising
  • rotary vane pump or combination of
  • rotary vane pump and 250 m3/h
  • (145 cfm) rootsblower,
  • 400 V, 3 phase, 32 A max.
  • Rotary platform Aluminum, 400 mm Ø
  • Gas channels 3–4
  • ECR setup
  • Photoresist Ashing
  • SU8 Ashing

The GIGA 690 was 4 years in production and is in a realy good condition. Year of manuafcture mid 2015 and taken out of production in early 2019.

The Machine is currently crated as can be seen, but can easily be prepared for inspection. The location is in Germany. For further information please contact us.

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