Spare Parts, Service and Upgrades
The APEX Semiconductor GmbH is a service and solution provider for the semiconductor industry. We repair and service, upgrade or optimize photolithographic machines worldwide.
Since August 1999, we support a wide range of Photo Equipment from OEMs who no longer exist (i.e. Convac-Fairchild, B.L.E. Laboratory Equipment, SSE (Sister Semiconductor Equipment), SVG (Silicon Valley Group), ATMsse, APT (Convac) or where the OEMs have simply ceased support due to the age of the systems.
For a wide range of Models we provide the following services and spare parts:
- Karl Suss ACS 200 Classic, Coater, Developer, Hotplate, Coolplate , VPO Tracks
- Karl Suss RC8 Standalone Coater, Hotplate Tools
- Suss Microtec Gamma 60 and 80, ACS 200+, Delta Coater, Developer or Table Top
- Fairchild / Convac / Suss Microtec Falcon Coater, Developer Hotplate, Coolplate, HMDS, VPO, Lift-Off
- Convac M6000 Coater, Developer, HMDS, Hotplate, Cleaner, Lift Off, Etcher etc.
- Convac M2000 Coater, Developer tracks and all other manual tools
- Convac manual standalone process machines
- Convac APT systems
- B.L.E. Gamma, Respect, Acrobat, Delta .
- SSE and ATMsse Maximus 804 , Opticoat, Optiwet Optihot
- SVG 90s Tracks and other SVG Tools, Coater, Developer, Hotplate, Coolplate,
- Semitek, Hamatech
- KLA 21xx
Our services include the following:
- Onsite Troubleshooting
- Onsite Escalation Service
- Online support
- Overhauls and Refurbishments of machines and subsystems i.e. Genmark Robots, Isel Robots and Frogleg Robots, Single Process Modules like Hotplates, Coolplates, Coater stations etc.
- Parts Repairs for electrical, mechanical and pneumatical components
- Installation and De-installation service
- Relocation service for process equipment
- Process support and optimaztion
- Source Inspection
- We also are able to offer Specialist service on KLA 21xx support and spare parts
Due to our long experience in the industry with 2″ and smaller and up to 16″ substrates, either round or square, we are capable to offer upgrades where we redesign hardware without software changes.
We also hold a vast stock (400 square meters ) of new or preowned spare parts: Various spin motors, spin controllers (Novotron ND 21- 31, Convac, Seidel WKS65, Berger Lahr, Metronix …), CPU units for Convac, SSE (PMA PU 104 …), Convac PCBs, SVG PCBs, SSE PCBs etc. electrical parts, mechanical parts and assemblies….
If you have an older Coater-Developer Tool and the system has light of severe problems or you are simply looking for support on an older process machine, please call us. We are here to support you.